Magnetic suspension based on passive gravity compensation

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14 Apr, 2026

BibTex:
Research Area:	TU/e	Year:	2008
Type of Publication:	In Proceedings
Authors:	Janssen, JLG; Paulides, JJH; Lomonova, EA

Book title:	4th IEEE Benelux Young Researchers Symposium in Electrical Power Engineering
Pages:	1-5
Address:	Eindhoven, The Netherlands
Month:	7-8 February, 2008


@conference{2008YRS, author = "JLG Janssen and JJH Paulides and EA Lomonova", abstract = "The ever increasing quest for smaller details on computer chips requires evermore accurate lithographic machinery. This paper discusses part of the design of a permanent magnet based vibration isolation system to be used within such machinery, specifically, concerns with the influence of flux-focusing materials, used for structural support and magnetic shielding, on the magnetic modeling and the interaction force.", address = "Eindhoven, The Netherlands", booktitle = "4th IEEE Benelux Young Researchers Symposium in Electrical Power Engineering", month = "7-8 February, 2008", pages = "1-5", title = "{M}agnetic suspension based on passive gravity compensation", year = "2008", }
Abstract:	The ever increasing quest for smaller details on computer chips requires evermore accurate lithographic machinery. This paper discusses part of the design of a permanent magnet based vibration isolation system to be used within such machinery, specifically, concerns with the influence of flux-focusing materials, used for structural support and magnetic shielding, on the magnetic modeling and the interaction force.

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